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Compact SEM and TM

Hitachi offers for every need a suitable SEM instrument, from tabletop up to cold field emission. Each system has its own advantages to get the best out of it for your benefit. Beside the systems below Hitachi also offers solutions for TEM and FIB.
Just ask and we are happy to support you.

Alt TextpdfOverview of all Hitachi systems

TM4000 III (TM4000Plus III)

Alt TextpdfTM4000 III Brochure

Reduce your workload and achieve more consistent results.

  • More automation with macro options for stage movement, magnification settings and image capture.
  • Mode 5, the new high-current setting with improved signal for imaging and EDX analysis of particles.

Plan ahead

  • The TM4000III is equipped with a system that allows you to monitor the remaining lifetime of the filament, preventing it from failing when it is needed most, e.g. EDX mapping experiments.

More routine with less time required

  • The new functions help you to improve and standardise your quality control.

Hitachi FlexSEM 1000 II

Alt TextpdfFlexSEM 1000 II Brochure

compact variable pressure SEM

EDX detectors for SEM

For the Hitachi TM4000 II and the FlexSEM II electron microscope there are special options from Oxford instruments and Bruker Nano specific for these instruments. All other Hitachi SEM instruments can be equipped with any commercially available EDX detector.

Oxford AZtecLiveOne

  • maintenance free, high performance SSD detector with 30 mm2 SATW element and peltier cooling
  • resolution < 137 eV @ MnKa or < 158 eV @ CuKa

Bruker Quantax 75

Alt TextpdfQuantax 75 Brochure

High performance SSD detector


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